1、 Equipment Introduction
Semiconductor ultrapure water equipment is an ultrapure water equipment used for cleaning semiconductor production parts, which needs to meet specific water quality standards,The effluent quality of semiconductor ultrapure water equipment should meet the requirements of the United StatesASTMPure water quality standard, Chinese electronic industry electronic grade water quality technical standard(18MΩ.cm、15MΩ.cm、10MΩ.cm、2MΩ.cm、0.5MΩ.cm)Pure water indicators for semiconductor industry and water quality standards for integrated circuits. grow luxuriantlyThe foundation of environmental protection in meeting user water standardsOn the basis of this, the water tanks in the equipment system are equipped with liquid level control systems, the water pumps are equipped with pressure protection devices, online water quality detection and control instruments, and electrical systems are usedPLCProgrammable controllers truly achieve unmanned operation, while adopting a unified method of recommendation and customer requirements in process material selection, making the equipment more cost-effective and reliable compared to other similar products.
2、 Design standards and basis
1. Tailored according to the detailed water quality report provided by the user.
2. Technical specifications for water treatment equipment《JB/T 2932-1999》
3. Standard for reverse osmosis water treatment equipment《CJ/T119-2000》
4. Complete set of low-voltage switchgear and control equipment《IEC439-1》
5. laboratoryultrapure waterTECHNICAL INDEXstandard《GB6682-2008》
6. National electronic gradeultrapure waterSpecifications《GB/T11446.1-1997》
3、 Process flow
1、 Raw water - Raw water booster pump - Multi medium filter - Activated carbon filter - Softener - Precision filter - First stage reverse osmosis -PHAdjustment - Intermediate water tank - Second stage reverse osmosis - Purified water tank - Pure water pump -EDISystem - Ultra pure water tank - Pure water pump - Polishing device - Terminal ultrafiltration - Water point
4、 Design Features
1. The system adopts fully automatic control(Manual control can also be used, and automatic backwashing and regeneration programs can be set during system operation;
2. All unit wiring is completed uniformly in the factory, reducing installation and debugging time;
3. The first and second stage reverse osmosis systems are equipped with reflux pipelines, and the reverse osmosis equipment is equipped with chemical cleaning devices;
4. Pipelines are generally usedUPVCtexture of material;
5. Integrated control system and integrated instrument system, etc., facilitate operation and management;
6. ROfilmRegular cleaning Equipped with startup and scheduled cleaningROMembrane function, extendedROMembrane service life;
7. Water recovery rate Through special process design, the equipment's performance has been significantly improvedrate of recovery, up to a maximum of70%;
8. The equipment has an automatic prompt function for consumables replacement, and the replacement cycle of consumables depends on changes in water quality and pressure, rather than the usage time of consumables. Considering the differences in water quality in different regions, the design is more scientific;
9. self-protection The automatic shutdown protection function for source water shortage also has the functions of automatic water production for water tank shortage and automatic shutdown for full water.
-----------Our company can provide 250L/H~1000T/H industrial ultrapure water equipment. For more parameter information, please consult our online customer service-----------