Shengmei was founded in 2005 and is a semiconductor equipment manufacturer registered in Zhangjiang High tech Park, Pudong New Area, Shanghai, with leading technology. The company integrates research and development, design, manufacturing, and sales. Its main products include semiconductor cleaning equipment, semiconductor electroplating equipment, and advanced wet packaging equipment. The company adheres to a development strategy of differentiated competition and innovation, and provides customized equipment and process solutions to global wafer manufacturing, advanced packaging, and other customers through independently developed single-chip megasonic cleaning technology, single-chip groove combination cleaning technology, electroplating technology, stress free polishing technology, and vertical furnace tube technology, effectively improving customer production efficiency, enhancing product yield, and reducing production costs.
Shengmei has the qualification of a high-tech enterprise and is responsible for the research and development of the "65-45nm Copper Interconnect Stress free Polishing Equipment Research and Development Project" during the 11th Five Year Plan period and the "20-14nm Copper Interconnect Copper Plating Equipment Research and Application" and "45-22nm Single Chip Wafer Cleaning Equipment Research and Application" during the 12th Five Year Plan period. Based on independent innovation, the company has successfully developed the first SAPS/TEBO megasonic cleaning technology and Tahoe single-chip groove combination cleaning technology through years of technological research and process accumulation. It can be applied to the field of wafer cleaning at 28nm and below technology nodes, effectively solving the problems of organic contamination and particle cleaning after etching, and significantly reducing the use of chemical reagents such as concentrated sulfuric acid. While helping customers reduce production costs, it also meets the requirements of energy conservation and emission reduction.
With advanced technology and rich product lines, Shengmei has developed into one of the few semiconductor special equipment suppliers with certain international competitiveness in Chinese Mainland. Its products have been recognized by many mainstream semiconductor manufacturers at home and abroad, and have gained good market reputation.