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Product Categories
- Imported electron beam exposure system
- Inductively coupled plasma etching
- Reactive ion etching
- RAITH Maskless Laser Direct Writing Equipment
- High resolution deep ultraviolet lithography machine
- French JFP wire bonding machine
- Desktop electron microscope
- Laser direct writing equipment
- nanoindenter
- EKC270
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Beijing Zhongke Fuhua Technology Co., Ltd
Swiss high-resolution deep ultraviolet lithography machine
NegotiableUpdate on 02/01
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Overview
The PHABLE device is based on the displacement Talbot lithography (DTL) technology used by Eutha, providing high-resolution lithography through a low-cost lithography system. DTL overcomes the limitations of diffraction in traditional photolithography and can expose high-quality sub micron periodic patterns. Non contact exposure can protect both the mask and wafer simultaneously, while unfocused imaging technology can achieve uniform exposure on non planar substrates and thick photoresist.
Product Details
PhableR has the ability to expose high-resolution periodic structures using a low-cost lithography system. It is similar to a traditional UV exposure machine, which approaches a wafer coated with photoresist to a mask and then irradiates it with a beam of deep ultraviolet light. Thanks to Eucitha's groundbreaking PHABLE exposure technology, resolution is no longer limited by unwanted diffraction effects. Structures such as submicron periodic linear gratings and two-dimensional patterns (such as hexagonal and tetragonal lattice exposures) have high uniformity and fidelity.
The PhableR 100 DUV lithography machine is a basic manual machine designed for scientific research and development. For nano periodic structures, large-scale, uniform, and repeatable one-dimensional and two-dimensional grating structures can be fabricated without the need for complex manufacturing processes or experience. Some characteristics of equipment and services:
1. The device is easy to operate
2. Good compatibility with upstream and downstream processes and supporting equipment
Widely applicable, including:
